Measurement of plasma parameters in He microdischarge by means of additional sensor electrode

The temperature and density of electrons are measured in a high pressure dc He microdischarge plasma. An additional electrode sensor, placed at the boundary of the discharge volume, is used to measure the sensor current-voltage characteristics and their first and second derivatives. The electron tem...

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Veröffentlicht in:Physics of plasmas 2017-05, Vol.24 (5)
Hauptverfasser: Kudryavtsev, A. A., Saifutdinov, A. I., Stefanova, M. S., Pramatarov, P. M., Sysoev, S. S.
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container_issue 5
container_start_page
container_title Physics of plasmas
container_volume 24
creator Kudryavtsev, A. A.
Saifutdinov, A. I.
Stefanova, M. S.
Pramatarov, P. M.
Sysoev, S. S.
description The temperature and density of electrons are measured in a high pressure dc He microdischarge plasma. An additional electrode sensor, placed at the boundary of the discharge volume, is used to measure the sensor current-voltage characteristics and their first and second derivatives. The electron temperature is determined from the transition region of the sensor current-voltage characteristics, in particular from the slow part of the Electron Energy Distribution Function. The electron density is determined from the ion saturation current. The results from the measurements show that the temperature of the slow group of electrons is low about 0.2–0.3 eV and the electron density is about 1012–1014 cm−3.
doi_str_mv 10.1063/1.4983620
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subjects Current voltage characteristics
Distribution functions
Electrodes
Electron density
Electron energy
Electron energy distribution
Plasma
Plasma physics
Sensors
title Measurement of plasma parameters in He microdischarge by means of additional sensor electrode
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