Functional metal-insulator-metal top contacts for Si-based color photodetectors

Here, we report on Si-based color photodetectors using monolithically integrated metal-insulator-metal Fabry-Perot cavity top contacts. Contacts were formed by depositing Ag/SiO2/Ag layers with different oxide thicknesses for each color. This allowed controlling the transmission band position and wi...

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Veröffentlicht in:	Journal of applied physics 2016-12, Vol.120 (22)
Hauptverfasser:	Butun, Serkan, Aydin, Koray
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics CMOS Color Dyes Electron beams Fabry-Perot interferometers Insulators Photometers Quantum efficiency Silicon dioxide Silver
Online-Zugang:	Volltext
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