Low-temperature fabrication of fine structures on glass using electrical nanoimprint and chemical etching

Periodic structures were imprinted on a soda lime glass surface below its glass transition temperature (Tg) using a carbon-coated SiO2 mold under application of DC voltage. The structure height increased with the applied DC voltage, although no significant increase with pressure was found. At a temp...

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Veröffentlicht in:	Journal of applied physics 2013-08, Vol.114 (8)
Hauptverfasser:	Ikutame, Naoki, Kawaguchi, Keiga, Ikeda, Hiroshi, Sakai, Daisuke, Harada, Kenji, Funatsu, Shiro, Nishii, Junji
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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