Hybrid microcavity humidity sensor
This work presents an optical humidity sensing technique based on the combination of a whispering gallery mode microtoroidal cavity sensor and a nm-scale thick humidity-responsive polymer coating deposited via the initiated chemical vapor deposition process. As a result of the conformational change...
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| Veröffentlicht in: | Applied physics letters 2013-06, Vol.102 (24) |
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| container_title | Applied physics letters |
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| creator | Mehrabani, Simin Kwong, Philip Gupta, Malancha Armani, Andrea M. |
| description | This work presents an optical humidity sensing technique based on the combination of a whispering gallery mode microtoroidal cavity sensor and a nm-scale thick humidity-responsive polymer coating deposited via the initiated chemical vapor deposition process. As a result of the conformational change by the polymer in response to humidity, the sensitivity is increased by nearly two orders of magnitude in comparison to conventional refractometric sensing. Additionally, the dependence of the device performance on the film thickness is studied. Specifically, the thinner film enabled a faster response rate, yet a slower recovery rate, as compared to the thicker films. |
| doi_str_mv | 10.1063/1.4811265 |
| format | Article |
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| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2013-06, Vol.102 (24) |
| issn | 0003-6951 1077-3118 |
| language | eng |
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| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| title | Hybrid microcavity humidity sensor |
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