Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography
For ultralow-loss and polarization-insensitive spot-size converters (SSCs) on a silicon platform, we propose and demonstrate a silicon knife-edge taper waveguide with a gradual decrease in height as well as width toward the taper end. The taper was fabricated using a double-patterning method involvi...
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| Veröffentlicht in: | Applied physics letters 2013-03, Vol.102 (10) |
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| container_issue | 10 |
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| container_title | Applied physics letters |
| container_volume | 102 |
| creator | Takei, R. Suzuki, M. Omoda, E. Manako, S. Kamei, T. Mori, M. Sakakibara, Y. |
| description | For ultralow-loss and polarization-insensitive spot-size converters (SSCs) on a silicon platform, we propose and demonstrate a silicon knife-edge taper waveguide with a gradual decrease in height as well as width toward the taper end. The taper was fabricated using a double-patterning method involving i-line stepper photolithography and angled sidewall dry-etching. The SSC, with the knife-edge taper covered with a polymer secondary core, exhibited mode conversion losses of 0.35 and 0.21 dB for transverse electric-like and transverse magnetic-like modes, respectively. |
| doi_str_mv | 10.1063/1.4795308 |
| format | Article |
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| ispartof | Applied physics letters, 2013-03, Vol.102 (10) |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_4795308 |
| source | AIP Journals Complete; AIP Digital Archive; Alma/SFX Local Collection |
| title | Silicon knife-edge taper waveguide for ultralow-loss spot-size converter fabricated by photolithography |
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