Angular distributions of sputtered zirconium atoms

Angular distributions of sputtered zirconium atoms

Ion beams with energies in the range 1–2 keV are used to sputter neutral Zr atoms from a polycrystalline surface. Laser induced fluorescence detection is used to obtain angular distributions of sputtered neutrals as a function of ion impact direction, ion mass, ion energy, and spin–orbit state of th...

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Veröffentlicht in:The Journal of chemical physics 1993-04, Vol.98 (7), p.5887-5898
Hauptverfasser: WHITAKER, T. J, LI, A, WATTS, R. O
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Sprache:eng
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Atomic and molecular physics
Electronic structure of atoms, molecules and their ions: theory
Exact sciences and technology
Physics
Potential energy surfaces
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container_title The Journal of chemical physics
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creator WHITAKER, T. J
LI, A
WATTS, R. O
description Ion beams with energies in the range 1–2 keV are used to sputter neutral Zr atoms from a polycrystalline surface. Laser induced fluorescence detection is used to obtain angular distributions of sputtered neutrals as a function of ion impact direction, ion mass, ion energy, and spin–orbit state of the exiting atoms. About 40% of the sputtered atoms are excited. Angular distributions depend weakly on ion mass and energy. The angular distributions are fitted well by a modified form of the Roosendaal and Saunders model of sputtering.
doi_str_mv 10.1063/1.464880
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subjects Atomic and molecular physics
Electronic structure of atoms, molecules and their ions: theory
Exact sciences and technology
Physics
Potential energy surfaces
title Angular distributions of sputtered zirconium atoms
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