Photoemission study of direct photomicromachining in poly(vinylidene fluoride)

Direct pattern transfer onto poly(vinylidene fluoride) was achieved by using x-ray photons from a synchrotron radiation source. Quadrupole mass spectrometry and ultraviolet photoemission spectroscopy, combined with ab initio molecular orbital calculations, were employed to investigate the mechanism...

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Veröffentlicht in:Journal of applied physics 2000-04, Vol.87 (8), p.4010-4016
Hauptverfasser: Morikawa, Eizi, Choi, Jaewu, Manohara, Harish M., Ishii, Hisao, Seki, Kazuhiko, Okudaira, Koji K., Ueno, Nobuo
Format: Artikel
Sprache:eng
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