Effects of precursors and substrate materials on microstructure, dielectric properties, and step coverage of (Ba, Sr)TiO3 films grown by metalorganic chemical vapor deposition

(Ba, Sr)TiO 3 (BST) thin films have been grown on planar Ir/Si and Pt/Si substrates and on three-dimensional (3D) Ir electrodes by metalorganic chemical vapor deposition using two kinds of β-diketonate-based BST precursors. Film growth was studied as a function of film thickness, composition, and su...

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Veröffentlicht in:	Journal of applied physics 2000-01, Vol.87 (1), p.124-132
Hauptverfasser:	Gao, Y., He, S., Alluri, P., Engelhard, M., Lea, A. S., Finder, J., Melnick, B., Hance, R. L.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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