Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method

A wet cleaning solution was designed to specifically eliminate nonferroelectric phases, such as pyrochlore, PbO, and the etching damaged layer. Scanning electron microscopy pictures clearly showed that treatment with the cleaning solution completely removed these nonferroelectric phases. After remov...

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Veröffentlicht in:	Journal of applied physics 1999-12, Vol.86 (11), p.6376-6381
Hauptverfasser:	Lee, June Key, Park, Youngsoo, Chung, Ilsub, Oh, Sang Jeong, Jung, Dong Jin, Song, Yoon Jong, Koo, Bon Jae, Lee, Sung Yung, Kim, Kinam, Desu, Seshu B.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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