Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method

Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method

A wet cleaning solution was designed to specifically eliminate nonferroelectric phases, such as pyrochlore, PbO, and the etching damaged layer. Scanning electron microscopy pictures clearly showed that treatment with the cleaning solution completely removed these nonferroelectric phases. After remov...

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Veröffentlicht in:Journal of applied physics 1999-12, Vol.86 (11), p.6376-6381
Hauptverfasser: Lee, June Key, Park, Youngsoo, Chung, Ilsub, Oh, Sang Jeong, Jung, Dong Jin, Song, Yoon Jong, Koo, Bon Jae, Lee, Sung Yung, Kim, Kinam, Desu, Seshu B.
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container_end_page 6381
container_issue 11
container_start_page 6376
container_title Journal of applied physics
container_volume 86
creator Lee, June Key
Park, Youngsoo
Chung, Ilsub
Oh, Sang Jeong
Jung, Dong Jin
Song, Yoon Jong
Koo, Bon Jae
Lee, Sung Yung
Kim, Kinam
Desu, Seshu B.
description A wet cleaning solution was designed to specifically eliminate nonferroelectric phases, such as pyrochlore, PbO, and the etching damaged layer. Scanning electron microscopy pictures clearly showed that treatment with the cleaning solution completely removed these nonferroelectric phases. After removing the nonferroelectric phases, ferroelectric properties such as remnant polarization, coercive voltage, and leakage current, were remarkably improved. In addition, the wet cleaned ferroelectric capacitors yielded superior endurance against hydrogen-induced damage compared to those of the noncleaned capacitors.
doi_str_mv 10.1063/1.371700
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title Improvement in the electrical properties in Pt/Pb(Zr0.52Ti0.48)O3/Pt ferroelectric capacitors using a wet cleaning method
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