Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films
The wafer flexure technique was used to characterize the d31 coefficient of a number of sol–gel and radio frequency (rf) sputtered lead zirconate titanate (PZT) thin films with thicknesses between 0.6 and 3 μm. Typical d31 values for well-poled 52/48 sol–gel films were found to be between −50 and −6...
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| Veröffentlicht in: | Journal of applied physics 1999-05, Vol.85 (9), p.6711-6716 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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