Electrostatically coupled vibration modes in unimorph complementary microcantilevers

To extend the tuning capabilities of radio frequency devices, coupled microelectromechanical systems are often employed. In this letter, we demonstrate piezoelectrically actuated, electrically tuneable resonator systems based on coupled micromechanical oscillators operating in a flexural vibration m...

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Veröffentlicht in:	Applied physics letters 2012-03, Vol.100 (12), p.124104-124104-4
Hauptverfasser:	Lebedev, V., Heidrich, N., Knöbber, F., Sah, R. E., Pletschen, W., Raynor, B., Polyakov, V., Cimalla, V., Ambacher, O.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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