Low energy, ion-induced electron and ion emission from stainless steel: The effect of oxygen coverage and the implications for discharge modeling

Absolute yields of electrons and negative ions resulting from positive ions impacting stainless steel have been determined as a function of impact energy for clean and oxygen-covered surfaces. Photoelectron emission has been used to monitor the effect of oxygen coverage on the surface work function. The emission of negative ions and electrons has been described with an excitation mechanism similar to that used in the Menzel–Gomer–Redhead model. We illustrate the implications of the present observations for discharge modeling and diagnostics by citing a parallel-plate, rf discharge in oxygen as an example.