Thermoelastic strain and plastic yielding in aluminum nitride on sapphire
The stress state of AlN/Al2O3 heteroepitaxial structures was probed by curvature measurements. The structures were found to be concave at the deposition temperature and to become convex or remain concave—depending on film thickness—on cooling to room temperature. The conclusion is drawn that film de...
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| Veröffentlicht in: | Journal of applied physics 1999-02, Vol.85 (3), p.1876-1882 |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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