Nonspecular x-ray scattering in a multilayer-coated imaging system

We present a rigorous theoretical treatment of nonspecular x-ray scattering in a distributed imaging system consisting of multilayer-coated reflective optics. The scattering from each optical surface is obtained using a vector scattering theory that incorporates a thin film growth model to provide a...

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Veröffentlicht in:	Journal of applied physics 1998-07, Vol.84 (2), p.1003-1028
Hauptverfasser:	Stearns, D. G., Gaines, D. P., Sweeney, D. W., Gullikson, E. M.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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