Surface acoustic wave solid-state rotational micromotor

Surface acoustic waves (SAWs) are used to drive a 1mm diameter rotor at speeds exceeding 9000rpm and torque of nearly 5nNm. Unlike recent high-speed SAW rotary motors, however, the present design does not require a fluid coupling layer but interestingly exploits adhesive stiction as an internal prel...

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Veröffentlicht in:	Applied physics letters 2012-01, Vol.100 (3), p.033503-033503-3
Hauptverfasser:	Shilton, Richie J., Langelier, Sean M., Friend, James R., Yeo, Leslie Y.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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