A comprehensive study on the leakage current mechanisms of Pt/SrTiO3/Pt capacitor

The leakage current characteristics of SrTiO3 MIM capacitors, fabricated using atomic layer deposition, are investigated. The characteristics are highly sensitive to the polarity and magnitude of applied voltage bias, punctuated by sharp increases at high field. The characteristics are also asymmetr...

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Veröffentlicht in:	Journal of applied physics 2012-01, Vol.111 (1)
Hauptverfasser:	Mojarad, Shahin A., Kwa, Kelvin S. K., Goss, Jonathan P., Zhou, Zhiyong, Ponon, Nikhil K., Appleby, Daniel J. R., Al-Hamadany, Raied A. S., O’Neill, Anthony
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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