Amorphous magnetic films produced by pulsed laser deposition

Amorphous magnetic Fe–Co–Ni–Si–B films have been produced on silicon and glass substrates by means of XeCl excimer laser ablation of amorphous magnetic ribbons. Laser fluence, the number of pulses, and target–substrate distance were the variable parameters. The films were studied with x-ray specular...

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Veröffentlicht in:Journal of applied physics 1997-08, Vol.82 (3), p.1408-1415
Hauptverfasser: Nikitin, P. I., Beloglazov, A. A., Toporov, A. Yu, Valeiko, M. V., Konov, V. I., Perrone, A., Luches, A., Mirenghi, L., Tapfer, L.
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container_end_page 1415
container_issue 3
container_start_page 1408
container_title Journal of applied physics
container_volume 82
creator Nikitin, P. I.
Beloglazov, A. A.
Toporov, A. Yu
Valeiko, M. V.
Konov, V. I.
Perrone, A.
Luches, A.
Mirenghi, L.
Tapfer, L.
description Amorphous magnetic Fe–Co–Ni–Si–B films have been produced on silicon and glass substrates by means of XeCl excimer laser ablation of amorphous magnetic ribbons. Laser fluence, the number of pulses, and target–substrate distance were the variable parameters. The films were studied with x-ray specular reflectivity, x-ray diffraction, x-ray photoelectron spectroscopy, profilometry, and ellipsometry. Laser ablation has been found to provide a good transfer of composition and structure from the ribbon targets to the deposited films, with excellent mechanical and optical quality of the films. Magnetic properties of the films were examined by a technique based on the magneto-optical Kerr effect. The films revealed well-defined in-plane uniaxial anisotropy. They demonstrated coercivity and anisotropy field values comparable to those of the initial ribbons, and much higher steepness of substantially rectangular hysteresis loops. The films can have a number of prospective applications in magnetic sensors, switches, and concentrators.
doi_str_mv 10.1063/1.365918
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title Amorphous magnetic films produced by pulsed laser deposition
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