Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine

In this article, we report values of ion energy and angular distributions measured at the grounded electrode of an inductively coupled discharge in chlorine gas. The inductive rf drive in our cell produced high plasma densities (1011/cm3 electron densities) and stable plasma potentials. As a result,...

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Veröffentlicht in:	Journal of Applied Physics 1997-05, Vol.81 (9), p.5950-5959
Hauptverfasser:	Woodworth, J. R., Riley, M. E., Miller, P. A., Hebner, G. A., Hamilton, T. W.
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION ANGULAR DISTRIBUTION CHLORINE ENERGY DEPENDENCE HIGH-FREQUENCY DISCHARGES IONS MICROELECTRONICS PLASMA DIAGNOSTICS WALL EFFECTS
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