Nanoindentation studies of single-crystal (001)-, (011)-, and (111)-oriented TiN layers on MgO

The mechanical properties of (001)-, (011)-, and (111)-oriented MgO wafers and 1-μm-thick TiN overlayers, grown simultaneously by dc magnetron sputter deposition at 700 °C in a mixed N2 and Ar discharge, were investigated using nanoindentation. A combination of x-ray-diffraction (XRD) pole figures,...

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Veröffentlicht in:	Journal of Applied Physics 1996-12, Vol.80 (12), p.6725-6733
Hauptverfasser:	Ljungcrantz, H., Odén, M., Hultman, L., Greene, J. E., Sundgren, J.-E.
Format:	Artikel
Sprache:	eng
Schlagworte:	ANNEALING CRYSTAL STRUCTURE ELASTICITY HARDNESS INDENTATION LAYERS MAGNESIUM OXIDES MATERIALS SCIENCE SPUTTERED MATERIALS SPUTTERING TITANIUM NITRIDES X-RAY DIFFRACTION XRD YOUNG MODULUS
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