Charge storage characteristics of ultra-small Pt nanoparticle embedded GaAs based non-volatile memory
Charge storage characteristics of ultra-small Pt nanoparticle embedded devices were characterized by capacitance-voltage measurements. A unique tilt target sputtering configuration was employed to produce highly homogenous nanoparticle arrays. Pt nanoparticle devices with sizes ranging from ∼0.7 to...
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Veröffentlicht in: | Applied physics letters 2011-08, Vol.99 (7), p.072104-072104-3 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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