Mass density and hydrogen content of diamondlike carbon as related to the preparation by plasma-enhanced chemical vapor deposition

Combined neutron and x-ray reflectometry was used to determine mass density and hydrogen content for thin (less than 3000 Å) diamondlike hydrocarbon films on polished Si (100) substrates. The introduction of ‘‘twin’’ neutron reflectometry improved the accuracy of the measurements. Mass densities in...

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Veröffentlicht in:	Journal of applied physics 1996-04, Vol.79 (8), p.4050-4056
Hauptverfasser:	Vigild, M. E., Findeisen, E., Feidenhans’l, R., Barholm-Hansen, C., Bentzon, M. D., Bindslev Hansen, J.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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