Topography evolution mechanism on fused silica during low-energy ion beam sputtering
In this study, the topography evolution of fused silica surfaces during low-energy ion beam erosion has been investigated depending on the ion incidence angle and with focus on the importance of the initial surface topography. Ripple prepattern, also prepared by ion beam erosion, that exhibits an an...
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| Veröffentlicht in: | Journal of applied physics 2011-02, Vol.109 (4), p.043501-043501-6 |
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| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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