Elastic constants of single-crystal transition-metal nitride films measured by line-focus acoustic microscopy

The elastic constants of single-crystal NbN, VN, and TiN films were determined from surface acoustic wave (SAW) dispersion curves obtained by the use of an acoustic microscope with a line-focus beam. Measurements were carried out for single-crystal nitride films grown on the (001) plane of single-cr...

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Veröffentlicht in:	Journal of applied physics 1992-09, Vol.72 (5), p.1805-1811
Hauptverfasser:	KIM, J. O, ACHENBACH, J. D, MIRKARIMI, P. B, SHINN, M, BARNETT, S. A
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Elasticity, elastic constants Exact sciences and technology Mechanical and acoustical properties of condensed matter Mechanical properties of solids Physics
Online-Zugang:	Volltext
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