Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films
The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thi...
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| Veröffentlicht in: | Journal of applied physics 1991-11, Vol.70 (10), p.5538-5543 |
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| container_end_page | 5543 |
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| container_issue | 10 |
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| container_title | Journal of applied physics |
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| creator | CHIAN-PING YE TAMAGAWA, T POLLA, D. L |
| description | The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500-μm) silicon substrates and thin (1.0-μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films. |
| doi_str_mv | 10.1063/1.350212 |
| format | Article |
| fullrecord | <record><control><sourceid>pascalfrancis_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_350212</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>5027017</sourcerecordid><originalsourceid>FETCH-LOGICAL-c322t-15eabdce9cccb29b730053dc136993aa525578403a099516ba0bbb90198767f33</originalsourceid><addsrcrecordid>eNo9kE9LAzEQxYMoWKvgR8jBQwW3zmzMZnOUUv9AoR7qpZclySYY2e4uyQrtt2-WFk9v3uM3A_MIuUeYIxTsGeeMQ475BZkglDITnMMlmUDKslIKeU1uYvwFQCyZnJB-ue9t8DvbDqqhcfirvY20a2mfQhUOVLU1jdZ0bT26_hA621gzBG-odS5NkfqWfunZNuw3HrP945o9Jb_xo47b23ZNh58EOd_s4i25cqqJ9u6sU_L9ttwsPrLV-v1z8brKDMvzIUNula6NlcYYnUstGABntUFWSMmU4jnnonwBpkBKjoVWoLWWgLIUhXCMTcnsdNeELsZgXXX-qEKoxqYqrE5NJfThhPYqGtW4oFrj4z-fIAEo2BGeVGa8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films</title><source>AIP Digital Archive</source><creator>CHIAN-PING YE ; TAMAGAWA, T ; POLLA, D. L</creator><creatorcontrib>CHIAN-PING YE ; TAMAGAWA, T ; POLLA, D. L</creatorcontrib><description>The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500-μm) silicon substrates and thin (1.0-μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films.</description><identifier>ISSN: 0021-8979</identifier><identifier>EISSN: 1089-7550</identifier><identifier>DOI: 10.1063/1.350212</identifier><identifier>CODEN: JAPIAU</identifier><language>eng</language><publisher>Woodbury, NY: American Institute of Physics</publisher><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties ; Dielectrics, piezoelectrics, and ferroelectrics and their properties ; Exact sciences and technology ; Physics ; Pyroelectric and electrocaloric effects</subject><ispartof>Journal of applied physics, 1991-11, Vol.70 (10), p.5538-5543</ispartof><rights>1992 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c322t-15eabdce9cccb29b730053dc136993aa525578403a099516ba0bbb90198767f33</citedby><cites>FETCH-LOGICAL-c322t-15eabdce9cccb29b730053dc136993aa525578403a099516ba0bbb90198767f33</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=5027017$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>CHIAN-PING YE</creatorcontrib><creatorcontrib>TAMAGAWA, T</creatorcontrib><creatorcontrib>POLLA, D. L</creatorcontrib><title>Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films</title><title>Journal of applied physics</title><description>The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500-μm) silicon substrates and thin (1.0-μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films.</description><subject>Condensed matter: electronic structure, electrical, magnetic, and optical properties</subject><subject>Dielectrics, piezoelectrics, and ferroelectrics and their properties</subject><subject>Exact sciences and technology</subject><subject>Physics</subject><subject>Pyroelectric and electrocaloric effects</subject><issn>0021-8979</issn><issn>1089-7550</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1991</creationdate><recordtype>article</recordtype><recordid>eNo9kE9LAzEQxYMoWKvgR8jBQwW3zmzMZnOUUv9AoR7qpZclySYY2e4uyQrtt2-WFk9v3uM3A_MIuUeYIxTsGeeMQ475BZkglDITnMMlmUDKslIKeU1uYvwFQCyZnJB-ue9t8DvbDqqhcfirvY20a2mfQhUOVLU1jdZ0bT26_hA621gzBG-odS5NkfqWfunZNuw3HrP945o9Jb_xo47b23ZNh58EOd_s4i25cqqJ9u6sU_L9ttwsPrLV-v1z8brKDMvzIUNula6NlcYYnUstGABntUFWSMmU4jnnonwBpkBKjoVWoLWWgLIUhXCMTcnsdNeELsZgXXX-qEKoxqYqrE5NJfThhPYqGtW4oFrj4z-fIAEo2BGeVGa8</recordid><startdate>19911115</startdate><enddate>19911115</enddate><creator>CHIAN-PING YE</creator><creator>TAMAGAWA, T</creator><creator>POLLA, D. L</creator><general>American Institute of Physics</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>19911115</creationdate><title>Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films</title><author>CHIAN-PING YE ; TAMAGAWA, T ; POLLA, D. L</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c322t-15eabdce9cccb29b730053dc136993aa525578403a099516ba0bbb90198767f33</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1991</creationdate><topic>Condensed matter: electronic structure, electrical, magnetic, and optical properties</topic><topic>Dielectrics, piezoelectrics, and ferroelectrics and their properties</topic><topic>Exact sciences and technology</topic><topic>Physics</topic><topic>Pyroelectric and electrocaloric effects</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>CHIAN-PING YE</creatorcontrib><creatorcontrib>TAMAGAWA, T</creatorcontrib><creatorcontrib>POLLA, D. L</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><jtitle>Journal of applied physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>CHIAN-PING YE</au><au>TAMAGAWA, T</au><au>POLLA, D. L</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films</atitle><jtitle>Journal of applied physics</jtitle><date>1991-11-15</date><risdate>1991</risdate><volume>70</volume><issue>10</issue><spage>5538</spage><epage>5543</epage><pages>5538-5543</pages><issn>0021-8979</issn><eissn>1089-7550</eissn><coden>JAPIAU</coden><abstract>The pyroelectric coefficients and pyroelectric response in lead zirconate titanate (Pb(ZrxTi1−x)O3), lead titanate (PbTiO3), and zinc oxide (ZnO) thin films (0.1–2.0-μm thick) have been studied for possible integrated thermosensor applications. Pyroelectric properties of these films deposited on thick (500-μm) silicon substrates and thin (1.0-μm) polysilicon membranes have been investigated. The measured pyroelectric coefficients for these materials are 70, 95, and 1.0 nC/cm2 K for Pb(Zr0.54Ti0.46)O3, PbTiO3, and ZnO, respectively. Coupling effects between the pyroelectric film and substrate were studied. It was observed that the primary pyroelectric effect dominates the pyroelectric response in Pb(Zr0.54Ti0.46)O3 and PbTiO3 thin films while the secondary effect is dominant in ZnO thin films.</abstract><cop>Woodbury, NY</cop><pub>American Institute of Physics</pub><doi>10.1063/1.350212</doi><tpages>6</tpages></addata></record> |
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| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_350212 |
| source | AIP Digital Archive |
| subjects | Condensed matter: electronic structure, electrical, magnetic, and optical properties Dielectrics, piezoelectrics, and ferroelectrics and their properties Exact sciences and technology Physics Pyroelectric and electrocaloric effects |
| title | Experimental studies on primary and secondary pyroelectric effects in Pb(ZrxTi1-x)O3, PbTiO3, and ZnO thin films |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T17%3A11%3A38IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-pascalfrancis_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Experimental%20studies%20on%20primary%20and%20secondary%20pyroelectric%20effects%20in%20Pb(ZrxTi1-x)O3,%20PbTiO3,%20and%20ZnO%20thin%20films&rft.jtitle=Journal%20of%20applied%20physics&rft.au=CHIAN-PING%20YE&rft.date=1991-11-15&rft.volume=70&rft.issue=10&rft.spage=5538&rft.epage=5543&rft.pages=5538-5543&rft.issn=0021-8979&rft.eissn=1089-7550&rft.coden=JAPIAU&rft_id=info:doi/10.1063/1.350212&rft_dat=%3Cpascalfrancis_cross%3E5027017%3C/pascalfrancis_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |