Deposition of high quality YBa2Cu3O7-δ thin films over large areas by pulsed laser ablation with substrate scanning

We describe the transport and structural properties of YBa2Cu3O7−δ thin films deposited by pulsed laser ablation with computer-controlled substrate scanning. Films were deposited on LaAlO3 and SrTiO3 substrates covering a 2×3 cm area with thicknesses of 90 and 160 nm. The 90-nm thick films exhibited a thickness variation of ±8%, Tco = 90.7 ± 0.5 K, Jc = 4.8 ± 0.2 × 106 A/cm2 at 77 K, and a surface resistance (corrected for finite thickness) at 75 GHz of 10–12 mΩ at 77 K. For the 160-nm thick films, the thickness variation was