Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen-containing atmosphere

Experimental results are reported concerning the synthesis of pure, hard, and adherent titanium nitride layers by multipulse excimer (λ=308 nm) laser irradiation in a nitrogen or ammonia atmosphere. It is shown that the process is more efficient when the irradiation is performed in a nitrogen atmosp...

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Veröffentlicht in:	Journal of applied physics 1991-02, Vol.69 (3), p.1687-1696
Hauptverfasser:	D'ANNA, E, LEGGIERI, G, LUCHES, A, MARTINO, M, DRIGO, A. V, MIHAILESCU, I. N, GANATSIOS, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Physical radiation effects, radiation damage Physics Structure of solids and liquids crystallography Ultraviolet, visible, and infrared radiation effects (including laser radiation)
Online-Zugang:	Volltext
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