Power dissipation in capacitively coupled rf discharges

The power dissipation in capacitively coupled rf discharges (Ar, 400 Pa) has been studied by impedance measurements in the 10–50 MHz frequency range. The article focuses on electrodeless discharge configurations in which the field-supplying electrodes are separated from the discharge volume by a die...

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Veröffentlicht in:	Journal of applied physics 1990-11, Vol.68 (9), p.4461-4473
1. Verfasser:	BENEKING, C
Format:	Artikel
Sprache:	eng
Schlagworte:	Electric discharges Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges
Online-Zugang:	Volltext
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