Oxidation of metastable single-phase polycrystalline Ti0.5Al0.5N films: kinetics and mechanisms

Metastable single-phase, NaCl-structure, polycrystalline Ti0.5Al0.5N alloy films have been shown to exhibit much better high-temperature (750–900 °C) oxidation resistance than polycrystalline TiN films grown under similar conditions. The Ti0.5Al0.5N alloys, ≂3 μm thick, were deposited at temperature...

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Veröffentlicht in:Journal of applied physics 1990-02, Vol.67 (3), p.1542-1553
Hauptverfasser: MCINTYRE, D, GREENE, J. E, HAKANSSON, G, SUNDGREN, J.-E, MUNZ, W.-D
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Sprache:eng
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