Internal stress and internal friction in thin-layer microelectronic materials

Understanding of the static internal stress in supported thin layers can be aided by the use of dynamic mechanical analysis, with emphasis on internal friction measurements for the detection of defects susceptible to stress-induced ordering. In addition to the bending-bilayer and vibrating-reed meth...

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Veröffentlicht in:	Journal of applied physics 1990-04, Vol.67 (8), p.3661-3668
Hauptverfasser:	BERRY, B. S, PRITCHET, W. C
Format:	Artikel
Sprache:	eng
Schlagworte:	Anelasticity, internal friction, stress relaxation, and mechanical resonances Condensed matter: structure, mechanical and thermal properties Exact sciences and technology Mechanical and acoustical properties of condensed matter Physics
Online-Zugang:	Volltext
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