Characterization of ion damage on p-type cadmium telluride surfaces

The effects of low-energy Ar ions (0–800 eV), from an ion beam and in an rf sputtering unit on the surface of single-crystal p-type CdTe have been investigated as a function of the ion energy using measurements of current versus voltage, spectral response, and capacitance versus voltage for indium j...

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Veröffentlicht in:	J. Appl. Phys.; (United States) 1988-09, Vol.64 (5), p.2792-2794
Hauptverfasser:	CHIEN, K.-F, FAHRENBRUCH, A. L, BUBE, R. H
Format:	Artikel
Sprache:	eng
Schlagworte:	ARGON IONS CADMIUM COMPOUNDS CADMIUM TELLURIDES CHALCOGENIDES CHARGED PARTICLES COLLISIONS Condensed matter: structure, mechanical and thermal properties ELECTRIC CONDUCTIVITY ELECTRICAL PROPERTIES Exact sciences and technology ION COLLISIONS Ion radiation effects IONS MATERIALS SCIENCE PHOTOCONDUCTIVITY PHYSICAL PROPERTIES PHYSICAL RADIATION EFFECTS Physical radiation effects, radiation damage Physics RADIATION EFFECTS SPUTTERING Structure of solids and liquids crystallography TELLURIDES TELLURIUM COMPOUNDS 360605 > Materials-- Radiation Effects
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