Effect of hydrogen dilution of silane on optoelectronic properties in glow-discharged hydrogenated silicon films

Electrical and photoelectric properties of glow-discharged hydrogenated silicon films are measured as a function of hydrogen dilution. In the case of films deposited under the condition of highly diluted silane, microcrystalline states are formed accompanying remarkable decreases in the optical gap,...

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Veröffentlicht in:	Journal of applied physics 1985-11, Vol.58 (9), p.3661-3663
Hauptverfasser:	SHIRAFUJI, J, NAGATA, S, KUWAGAKI, M
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Electronic transport in condensed matter Exact sciences and technology Photoconduction and photovoltaic effects photodielectric effects Physics
Online-Zugang:	Volltext
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