Cross-sectional structures and depth profiles in bias sputtered GdCo films

Structures and compositions of sputtered GdCo films were carefully investigated using a carbon-replica technique and Auger electron spectroscopy. In zero-bias sputtered films, the columns are clearly observed to develop perpendicular to the substrate, and they become fine with increasing Gd content...

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Veröffentlicht in:	Journal of applied physics 1981-03, Vol.52 (3), p.2298-2300
Hauptverfasser:	Yasugi, Shin-ichi, Honda, Shigeo, Ohkoshi, Masatoshi, Kusuda, Tetsuzo
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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