Simulation of laser-induced backside wet etching of fused silica with hydrocarbon liquids
The mechanism of laser-induced backside wet etching (LIBWE) is important for the optimization of application processes but is still ambiguous. Extremely high surface absorption coefficients of more than 40 × 10 4 cm − 1 at λ = 248 nm that decay exponentially within less than 25 nm were measured...
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| Veröffentlicht in: | Journal of applied physics 2010-02, Vol.107 (3), p.034908-034908-8 |
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| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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