Biosensors using the Si nanochannel junction-isolated from the Si bulk substrate

The biosensor using a silicon nanochannel field effect transistor has been developed on the basis of a bulk silicon substrate instead of an expensive silicon-on-insulator material, for low cost applications. "Top-down" fabricated Si nanochannels for detecting prostate specific antigen (PSA...

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Veröffentlicht in:	Journal of applied physics 2009-12, Vol.106 (11), p.114701-114701-5
Hauptverfasser:	Ahn, Chang-Geun, Park, Chan Woo, Yang, Jong-Heon, Ah, Chil Seong, Kim, Ansoon, Kim, Tae-Youb, Yu, Han Young, Jang, Moongyu, Kim, Sang-Hoon, Baek, In-Bok, Lee, Seongjae, Sung, Gun Yong
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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