Contact resistance between metal and carbon nanotube interconnects: Effect of work function and wettability

The contact resistance of 14 different electrode metals with the work function between 3.9 and 5.7 eV has been investigated for carbon nanotube (CNT) interconnects. We observed that the contact resistance was mainly influenced by the two following parameters: the wettability and the work function di...

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Veröffentlicht in:	Applied physics letters 2009-12, Vol.95 (26), p.264103-264103-3
Hauptverfasser:	Lim, Seong Chu, Jang, Jin Ho, Bae, Dong Jae, Han, Gang Hee, Lee, Sunwoo, Yeo, In-Seok, Lee, Young Hee
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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