High- Q , in-plane modes of nanomechanical resonators operated in air

High- Q , in-plane modes of nanomechanical resonators operated in air

Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of p...

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Veröffentlicht in:Journal of applied physics 2009-05, Vol.105 (9), p.094315-094315-6
Hauptverfasser: Waggoner, Philip S., Tan, Christine P., Bellan, Leon, Craighead, Harold G.
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creator Waggoner, Philip S.
Tan, Christine P.
Bellan, Leon
Craighead, Harold G.
description Nanomechanical resonators have traditionally been limited to use in vacuum due to low quality factors that come as a result of viscous damping effects in air or liquid. We have fabricated arrays of 90 nm thick trampoline-shaped resonators, studied their resonant frequency spectrum as a function of pressure, and found that some high frequency modes exhibit quality factors over 2000 at atmospheric pressure. We have excited the in-plane resonances of these devices, verified their identities both experimentally and with finite element modeling, and demonstrated their advantageous characteristics for ambient sensing. Even after deposition of a relatively thick polymer layer, the in-plane resonant modes still boast quality factors on the order of 2000. These results show promise for the use of nanomechanical resonant sensors in real-time atmospheric sensing applications.
doi_str_mv 10.1063/1.3123767
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title High- Q , in-plane modes of nanomechanical resonators operated in air
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