Fano filters based on transferred silicon nanomembranes on plastic substrates

We report here the characteristics of surface-normal optical filters based on Fano resonances on patterned single crystalline silicon nanomembranes (SiNMs), which were fabricated and transferred onto transparent plastic substrates using a SiNM wet transfer process. Detailed experimental and theoreti...

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Veröffentlicht in:Applied physics letters 2008-08, Vol.93 (6)
Hauptverfasser: Qiang, Zexuan, Yang, Hongjun, Chen, Li, Pang, Huiqing, Ma, Zhenqiang, Zhou, Weidong
Format: Artikel
Sprache:eng
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Zusammenfassung:We report here the characteristics of surface-normal optical filters based on Fano resonances on patterned single crystalline silicon nanomembranes (SiNMs), which were fabricated and transferred onto transparent plastic substrates using a SiNM wet transfer process. Detailed experimental and theoretical analyses were carried out on the angular- and polarization-dependent transmission properties. The filter transmission is independent of the incident beam polarization under surface-normal conditions. Angle-independent transmission was observed for specific Fano resonances with certain polarizations. The measured angle-dependent transmission agrees well with the simulated transmission and dispersion properties based on the propagation wave-vector analysis.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2971199