Secondary electron imaging at gas pressures in excess of 1kPa

Environmental scanning electron microscopy (ESEM) enables electron imaging of gas-mediated, direct-write nanolithography processes, liquids, and hydrated biomaterials. However, ESEM is limited by poor image quality at gas pressures in excess of ∼600Pa. Here the authors achieve high quality secondary...

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Veröffentlicht in:	Applied physics letters 2007-07, Vol.91 (5)
Hauptverfasser:	Toth, Milos, Uncovsky, Marek, Ralph Knowles, W., Baker, Francis S.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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