Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition

Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition

Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness of KNN film was 7.1μm and fully dense films were obtained. The dielectric constants ε3T∕ε0 of the as-deposited and annealed films at 1kHz were 116 and 545, respectively, which are highe...

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Veröffentlicht in:Applied physics letters 2007-04, Vol.90 (15)
Hauptverfasser: Ryu, Jungho, Choi, Jong-Jin, Hahn, Byung-Dong, Park, Dong-Soo, Yoon, Woon-Ha, Kim, Ki-Hoon
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container_issue 15
container_start_page
container_title Applied physics letters
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creator Ryu, Jungho
Choi, Jong-Jin
Hahn, Byung-Dong
Park, Dong-Soo
Yoon, Woon-Ha
Kim, Ki-Hoon
description Lead-free piezoelectric thick films of (K0.5Na0.5)NbO3 were fabricated by aerosol-deposition method. The thickness of KNN film was 7.1μm and fully dense films were obtained. The dielectric constants ε3T∕ε0 of the as-deposited and annealed films at 1kHz were 116 and 545, respectively, which are higher than any previously reported values for lead-free piezoelectric thin/thick films, either without or with heat treatment. The ferroelectric properties were improved after annealing and the maximum values of Pr=8.1μC∕cm3 and Ec=100kV∕cm were achieved. These values are markedly superior to those of sintered KNN ceramic counterparts.
doi_str_mv 10.1063/1.2720751
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title Fabrication and ferroelectric properties of highly dense lead-free piezoelectric (K0.5Na0.5)NbO3 thick films by aerosol deposition
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