Growth competition during glancing angle deposition of nanorod honeycomb arrays
Arrays of Ta nanorods were grown by glancing angle deposition (GLAD) onto honeycomb Cr nanodot patterns that were evaporated onto Si substrates through a self-assembled monolayer of Si O 2 nanospheres. Statistical size analyses from arrays of rods with variable average length l and width w , with 21...
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| Veröffentlicht in: | Applied physics letters 2007-02, Vol.90 (9), p.093103-093103-3 |
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| Hauptverfasser: | , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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