Effect of fluorine addition on transparent and conducting Al doped ZnO films

Al doped ZnO (AZO) films with varying fluorine content were prepared by radio frequency magnetron sputtering at a room temperature to investigate doping effects of fluorine on the structural, the optical, and the electrical properties. The small amount of fluorine addition to AZO films resulted in b...

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Veröffentlicht in:	Journal of applied physics 2006-09, Vol.100 (6)
Hauptverfasser:	Kim, Inho, Lee, Kyeong-Seok, Lee, Taek Seong, Jeong, Jeung-hyun, Cheong, Byeong-ki, Baik, Young-Joon, Kim, Won Mok
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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