Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

A mass sensor based on thin-film bulk acoustic resonator, intended for biomolecular applications, is presented. The thin film is a (002) AlN membrane, sputtered over Ti∕Pt on a (001) Si wafer, and released by surface micromachining of silicon. Two experiments are proposed to test the mass sensing pe...

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Veröffentlicht in:	Applied physics letters 2006-07, Vol.89 (3)
Hauptverfasser:	Campanella, Humberto, Esteve, Jaume, Montserrat, Josep, Uranga, Arantxa, Abadal, Gabriel, Barniol, Nuria, Romano-Rodríguez, Albert
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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