The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider

Inertial sliders are often used to produce coarse relative positioning for scanning probe microscopes. This article describes the design, dynamic analysis, and control of a compact four-segment piezoceramic tube scanner employing an inertial slider. Velocity feedback control, implemented using two-s...

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Veröffentlicht in:	Review of scientific instruments 2006-06, Vol.77 (6), p.063710-063710-7
Hauptverfasser:	Chao, Shih-Hui, Garbini, Joseph L., Dougherty, William M., Sidles, John A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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