Atomic force probe for sidewall scanning of nano- and microstructures

An atomic force microscope (AFM) probe applicable for sidewall scanning has been developed. In its configuration, a horizontal AFM cantilever is microassembled with a vertical AFM cantilever. An AFM tip located at the free end of the vertical cantilever and extending horizontally is capable of probi...

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Veröffentlicht in:	Applied physics letters 2006-04, Vol.88 (17), p.171908-171908-3
Hauptverfasser:	Dai, Gaoliang, Wolff, Helmut, Pohlenz, Frank, Danzebrink, Hans-Ulrich, Wilkening, Günter
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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