Observation of micromechanically controlled tuning of photonic crystal line-defect waveguide

We fabricated a photonic crystal (PC) line-defect waveguide integrated with a microelectromechanical actuator and demonstrated the optical switching operation. The device consisted of a PC line-defect waveguide fabricated in a silicon-on-insulator substrate and a polycrystalline-Si dielectric plate...

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Veröffentlicht in:Applied physics letters 2006-01, Vol.88 (1), p.011104-011104-3
Hauptverfasser: Iwamoto, Satoshi, Ishida, Satomi, Arakawa, Yasuhiko, Tokushima, Masatoshi, Gomyo, Akiko, Yamada, Hirohito, Higo, Akio, Toshiyoshi, Hiroshi, Fujita, Hiroyuki
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Sprache:eng
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