Transmission electron microscopic observation of nanoindentations made on ductile-machined silicon wafers

Nanoindentation tests were performed on a ductile-machined silicon wafer with a Berkovich diamond indenter, and the resulting indents were examined with a transmission electron microscope. It was found that the machining-induced subsurface amorphous layer undergoes significant plastic flow, and the...

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Veröffentlicht in:	Applied physics letters 2005, Vol.87 (21), p.211901-211901-3
Hauptverfasser:	Yan, Jiwang, Takahashi, Hirokazu, Tamaki, Jun'ichi, Gai, Xiaohui, Kuriyagawa, Tsunemoto
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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