Epitaxial growth and characteristics of N-doped anatase TiO2 films grown using a free-radical nitrogen oxide source

This paper reports on a systematic investigation of nitrogen (N) doping in single-crystalline TiO2 films possessing an anatase phase. TiO2 films heavily doped with N were grown with high crystallinity by employing a pulsed laser ablation technique using a close lattice-matched LaAlO3 (100) substrate...

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Veröffentlicht in:	Journal of applied physics 2005-06, Vol.97 (12)
Hauptverfasser:	Matsui, Hiroaki, Tabata, Hitoshi, Hasuike, Noriyuki, Harima, Hiroshi, Mizobuchi, Bunsho
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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