Nanomechanical characterization of cavity growth and rupture in hydrogen-implanted single-crystal BaTiO3

A thermodynamic model of cavity nucleation and growth in ion-implanted single-crystal BaTiO3 layer is proposed, and cavity formation is related to the measured mechanical properties to better understand hydrogen implantation-induced layer transfer processes for ferroelectric thin films. The critical...

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Veröffentlicht in:	Journal of applied physics 2005-04, Vol.97 (7)
Hauptverfasser:	Park, Young-Bae, Nardi, Patrick, Li, Xiaodong, Atwater, Harry A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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