Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays

We have investigated direct micromachining of quartz glass, using pulsed laser plasma soft x-rays (LPSXs) having a potential capability of nanomachining because the diffraction limit is ∼ 10 nm . The LPSX's were generated by irradiation of a Ta target with 532 nm laser light from a conventional...

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Veröffentlicht in:	Applied physics letters 2005-03, Vol.86 (10), p.103111-103111-3
Hauptverfasser:	Makimura, Tetsuya, Miyamoto, Hisao, Kenmotsu, Youichi, Murakami, Kouichi, Niino, Hiroyuki
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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